Simulation of millimeter-sized microwave plasma discharge generator under various conditions

A microwave plasma generator (MPG) of a sub-millimeter scale might be suitable for biomedical applications. However, there are still many unknowns regarding the MPG discharge behavior at this and specific conditions. two-dimensional model millimeter its simulation relative calculation in COMSOL Multiphysics software presented. filled with argon helium is simulated, respectively. The frequency source about 5 GHz considered. number density temperature electrons as well chemical composition obtained different power pressure electron peaks slightly downstream crossing point, asymmetrically y-plane due to fact that electromagnetic waves absorbed asymmetrically. relatively low everywhere, part, high operating pressure. directly underneath wave guide where absorbed. increases increase internal input MPG, decreases but cannot affected by change MPG. amount excited Ar+ Ars (metastable atom) Ar almost remained unchanged. In addition, He unchanged, while He+, Hes atom), He2+ increased results thus informative understanding physical characteristics millimeter-sized it will provide solid basis future development such hardware small capsules cancer therapy.